基于ZIF-8衍生碳的电阻式湿度传感器制备及性能研究
五邑大学应用物理与材料学院柔性传感材料与器件研究开发中心, 广东江门 529020
| 摘 要： | 随着智能可穿戴设备与健康监测技术的快速发展，具备高灵敏度、宽检测范围、低湿滞特性的柔性湿度传感器成为研究热点。传统湿度传感器受刚性基底、灵敏度低、稳定性差、温漂严重等问题限制，难以满足可穿戴检测需求。本研究以ZIF-8为前驱体，通过溶液搅拌、高温热处理及酸洗改性工艺，成功制备ZIF-8衍生多孔碳湿敏材料。采用滴涂法在柔性叉指电极上构筑柔性电阻式湿度传感器，系统探究改性条件（酸种类、酸洗浓度、酸洗时间）对材料微观结构、缺陷密度、比表面积及湿敏性能的影响，确定最优制备工艺：800°C高温热处理，80°C条件下采用2mol/L硫酸酸洗6h。所制备的ZIF8@800-H2SO4-2M传感器展现出优异的湿敏性能，检测范围达11%RH~98%RH，灵敏度为1.10/%RH，湿滞仅4.30%RH，响应时间54.82s，恢复时间25.21s。同时具备优异的重复性（重复性偏差<8.2%）、长期稳定性与机械弯曲稳定性。该传感器可精准监测人体呼吸信号，实现非接触式手掌湿度感知，在可穿戴健康监测、非接触人机交互等领域具有广阔应用潜力。 |
| 关 键 词： | ZIF-8衍生碳; 电阻式; 酸洗改性; 柔性传感器; 湿度传感机理; 可穿戴健康监测 |
| DOI： | 10.57237/j.cse.2026.03.001 |
View:
Downloads:
收稿日期: 2026-07-17
接受日期: 2026-08-14
在线出版日期: 2026-09-07
Fabrication and Performance Study of a Resistive Humidity Sensor Based on ZIF-8-Derived Carbon
Research Center for Flexible Sensing Materials and Devices, School of Applied Physics and Materials, Wuyi University, Jiangmen 529020, China
| Abstract: | Here is the English translation of the provided abstract, maintaining an academic and technical tone suitable for a research paper; With the rapid development of smart wearable devices and health monitoring technologies, flexible humidity sensors featuring high sensitivity, a wide detection range, and low hysteresis have become a research focus. Conventional humidity sensors are limited by rigid substrates, low sensitivity, poor stability, and significant temperature drift, making them inadequate for wearable detection requirements. In this study, ZIF-8 was employed as a precursor to successfully prepare ZIF-8-derived porous carbon humidity-sensitive materials through solution stirring, high-temperature heat treatment, and acid-washing modification. A flexible resistive humidity sensor was constructed on a flexible interdigital electrode via drop-coating. The effects of modification conditions (acid type, acid concentration, and acid-washing duration) on the material’s microstructure, defect density, specific surface area, and humidity-sensing performance were systematically investigated. The optimal preparation parameters were determined to be heat treatment at 800°C followed by acid washing with 2 mol/L sulfuric acid at 80°C for 6 h. The resulting ZIF8@800-H2SO4-2M sensor exhibited outstanding humidity‑sensing performance, including a detection range of 11%RH to 98%RH, a sensitivity of 1.10 /% RH, a hysteresis as low as 4.30% RH, a response time of 54.82 s, and a recovery time of 25.21 s. Furthermore, the sensor demonstrated excellent repeatability (deviation < 8.2%), long‑term stability, and mechanical bending stability. The sensor can accurately monitor human respiratory signals and achieve non‑contact palm humidity perception, indicating broad application potential in wearable health monitoring and non‑contact human-machine interaction. |
| Keywords: | ZIF-8-derived Carbon; Resistive Humidity Sensor; Acid-washing Modification; Flexible Sensor; Wearable Health Monitoring; Humidity Sensing Mechanism |
基金
| 1. | 广东省教育厅普通高校重点科研平台和项目创新团队项目 (No. 2025KCXTD047) |
| 2. | 松山湖材料实验室开放研究基金 (No. 2023SLABFN31) |
| 3. | 广东省大学生科技创新培育专项资金 (No. pdjh2025bk224) |
参考文献
| [1] | Zhao Z J, Duan Y X. A low cost fiber-optic humidity sensor based on silica sol-gel film [J]. Sensors and Actuators B: Chemical, 2011, 160 (1): 1340-1345. https://doi.org/10.1016/j.snb.2011.09.072 |
| [2] | 徐甲强, 张全法, 范福玲. 传感器技术 [M]. 哈尔滨: 哈尔滨工业大学出版社, 2004. |
| [3] | Zhang D, Wang M, Tang M, et al. Recent progress of diversiform humidity sensors based on versatile nanomaterials and their prospective applications [J]. Nano Research, 2023, 16 (10): 11938-11958. https://doi.org/10.1007/s12274-022-4917-y |
| [4] | Blank T A, Eksperiandova L P, Belikov K N. Recent trends of ceramic humidity sensors development: A review [J]. Sensors and Actuators B: Chemical, 2016, 228: 416-442. https://doi.org/10.1016/j.snb.2016.01.015 |
| [5] | Wang Z H, Fan X X, Li C J, Men G L, Han D M, Gu F B. Humidity-Sensing Performance of 3DOM WO₃ with Controllable Structural Modification [J]. ACS Applied Materials & Interfaces, 2018, 10 (4): 3776-3783. https://doi.org/10.1021/acsami.7b17048 |
| [6] | 陈文宇, 孙敏娜, 王力, 等. 新型柔性湿度传感器的研究进展 [J]. 传感器世界, 2023, 29 (10): 1-7. http://doi.org/10.16204/j.sw.issn.1006-883X.2023.10.001 |
| [7] | Ateia E E, Mohamed A T, Morsy M. Humidity sensor applications based on mesopores LaCoO3 [J]. Journal of Materials Science: Materials in Electronics, 2019, 30 (21): 19254-19261. https://doi.org/10.1007/s10854-019-02284-y |
| [8] | Güder F, Ainla A, Redston J, et al. Paper-based electrical respiration sensor [J]. Angewandte Chemie International Edition, 2016, 55 (19): 5727-5732. https://doi.org/10.1002/anie.201511805 |
| [9] | Chen C X, Jiang M J, Luo X L, et al. Ni-Co-P hollow nanobricks enabled humidity sensor for respiratory analysis and human-machine interfacing [J]. Sensors and Actuators B: Chemical, 2022, 370: 132441. https://doi.org/10.1016/j.snb.2022.132441 |
| [10] | 姚松平. 聚合物电解质湿度传感器的研究 [D]. 上海: 华东师范大学, 2023. http://doi.org/10.27149/d.cnki.ghdsu.2023.000262 |
| [11] | 郭元浩. 碳基电压输出型柔性湿度传感器的制备、性能及其可穿戴应用研究 [D]. 无锡: 江南大学, 2022. http://doi.org/10.27169/d.cnki.gwqgu.2022.002103 |
| [12] | Nag A, Mitra A, Mukhopadhyay S C. Graphene and its sensor-based applications: A review [J]. Sensors and Actuators A: Physical, 2018, 270: 177-194. https://doi.org/10.1016/j.sna.2017.12.028 |
| [13] | 郭睿. 氧化石墨烯的湿敏特性及其在电容式湿度传感器上的应用研究 [D]. 成都: 电子科技大学, 2016. |
| [14] | 王宁, 田文昊, 张昊生, 等. 石墨烯量子点法布里珀罗光纤湿度传感器 [J]. 光子学报, 2020, 49 (9): 107-114. |
| [15] | 杜春雷, 苗景歧, Kunz R E. Ta2O5平面波导湿度传感器的研究 [J]. 光学学报, 1994, 14 (6): 662-667. |
| [16] | Ali S, Hassan A, Hassan G, et al. All-printed humidity sensor based on graphene/methyl-red composite with high sensitivity [J]. Carbon, 2016, 105: 23-32. https://doi.org/10.1016/j.carbon.2016.04.013 |
| [17] | 程志豪. 基于石墨烯和石墨烯量子点的电阻式湿度传感器 [D]. 哈尔滨: 哈尔滨理工大学, 2024. http://doi.org/10.27063/d.cnki.ghlgu.2024.000960 |
| [18] | Huang Y, Wu H, Liang Z, et al. Rich vacancy-hosted-nitrogen sites on ZIF-derived porous carbon for enhanced humidity sensing [J]. Chemical Engineering Journal, 2025, 505: 159360. https://doi.org/10.1016/j.cej.2025.159360 |
| [19] | 姚星晔. 基于柔性湿度传感器的呼吸监测和手势检测系统研究 [D]. 上海: 华东师范大学, 2023. http://doi.org/10.27149/d.cnki.ghdsu.2023.000161 |
